A Laterally-Implanted Piezoresistive Skin Friction Sensor – Hilton Head Workshop Jun 2008

This paper presents the packaging, fabrication, and calibration of a piezoresistive skin-friction sensor for the direct measurement of wall shear stress. The floating-element structure integrates laterally-implanted piezoresistors into the tether sidewalls to form a fully active Wheatstone bridge for electromechanical transduction. Experimental characterization at a bias voltage of 1.5 V indicates a sensitivity of 4.24 µV/Pa , a noise floor of 11.4 mPa/rtHz at 1 kHz , a linear response up to the maximum testing range of 2 Pa , and a flat dynamic response up to the testing limit of 6.7 kHz.

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