An Aluminum Nitride Piezoelectric Microphone for Aeroacoustics Applications – Hilton Head Workshop Jun 2010

This paper describes an aluminum nitride (AlN)-based piezoelectric MEMS microphone designed to serve as aircraft fuselage instrumentation for full-scale noise characterization flight tests. The optimal microphone design was determined using lumped element modeling and composite plate theory. Measurements of the microphone’s frequency response and linearity revealed it to have a higher sensitivity (71 μV/Pa), larger dynamic range (29 – 147 dB) with lower noise floor, and significantly higher resonant frequency (89 kHz) than previous piezoelectric aeroacoustic microphones.

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