An Instrumentation Grade MEMS Condenser Microphone for Aeroacoustic Measurements – AIAA Jan 2008

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This paper presents improved results of an instrumentation-grade dual-backplate condenser microphone. This device is designed for aeroacoustic applications that require a high dynamic range and large bandwidth. Previous testing of the microphone with a charge amplifier to reduce attenuation due to parasitic capacitance yielded an unacceptably high noise floor. In this study, the noise floor of the microphone is lowered through the use of a low-noise voltage amplifier. With bias voltages of +/-9.3 V, a sensitivity of 172 uV/Pa, and a noise floor of 22.5 dB/rtHz are obtained. The noise floor is reduced to below that of other MEMS-based aeroacoustic microphones while maintaining su±cient bandwidth and maximum pressure.

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January 1, 2008