Characterization of a MEMS-Based Floating Element Shear Stress Sensor – AIAA Jan 2009

A microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor, developed for time-resolved turbulence measurement, is dynamically characterized via Stokes layer excitation. The floating element structure incorporates interdigitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection. Preliminary sensor characterization reveals a bandwidth of 6.1 kHz and a sensitivity of 23 mV/Pa at 4.2 kHz up to the testing limit of 1.1 Pa (bias voltage of 10 V ). The sensor performance surpasses previously reported direct MEMS shear stress sensors with a larger dynamic range (>100 dB) and the lowest noise floor(4.9 uPa/rtHz at 1 kHz).

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