Large Deflections of Clamped Composite Circular Plates with Initial In-Plane Tension – Society for Experimental Mechanics Feb 2008

Designs of several micromachined electroacoustic devices use thin composite plates in conjunction with electrical components to measure acoustic signals. Composite layers are needed for electrical passivation, moisture barriers, structure for electrical components, etc. The layers often contain residual stresses introduced during the fabrication process. The composite plate mechanics are crucial to microphone performance. This paper provides a fundamental composite plate model that is needed for design optimization of electroacoustic devices.

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