MEMS Shear Stress Sensors: Promise and Progress – AIAA Jun 2004


This paper reviews existing microelectromechanical systems (MEMS)-based shear stress sensors. The promise and progress of MEMS scaling advantages to improve the spatial and temporal resolution and accuracy of shear stress measurement is critically reviewed. The advantages and limitations of existing devices are discussed. Finally, unresolved technical issues are summarized for future sensor development.

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Posted on

June 1, 2004