This paper presents detailed results on noise modeling and experimental characterization applicable to piezoresistive MEMS transducers using a piezoresistive MEMS microphone as an example. To accurately model the lower limit of the dynamic range of piezoresistive MEMS transducers, a detailed noise equivalent circuit, piezoresistor noise model, and experimental noise measurements are needed. From the sensitivity and the total root-mean-square output noise, the minimum detectable signal (MDS) may be computed. Key experimental results include comparison of the DC bridge and AC bridge noise measurement techniques and use of the AC measurement technique when the piezoresistive transducer output noise is less than the low frequency DC setup noise.
